[P8-2] Mechanical Properties of Nanometer-sized Cu Contacts

Tokushi KIZUKA, Masanobu MORI, Satoru FUJISAWA, Akira YABE (1.Institute of Materials Science, University of Tsukuba, 2.National Institute of Advanced Industrial Science and Technology Institute of Mechanical Systems Engineering, 3.Research Center for Advanced Manufacturing on Nanoscale Science and Engineering National Institute of Advanced Industrial Science and Technology)

https://doi.org/10.7567/SSDM.2003.P8-2