[P9-5] Threshold Voltage Control on the Body-Tied FinFET (OMEGA MOSFET)

H. J. Jo、T. Park、J. D. Choe、S. Y. Han、J. H. Jeong、M. C. Chae、D. Park、K. Kim、E. Yoon、J.-H. Lee (1.Semiconductor R&D Center, Samsung Electronics Co., Ltd.、2.School of Materials Science and Engineering, Seoul National University、3.School of Electrical Engineering and Computer Science, Kyungpook National University)

https://doi.org/10.7567/SSDM.2003.P9-5