[B-6-3] An Impurity-Enhanced Oxidation Assisted Doping Profile Evaluation for Three-Dimensional and Vertical-Channel Transistors

Kei Kobayashi, Takanori Eto, Kiyoshi Okuyama, Kentaro Shibahara, Hideo Sunami (1.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2004.B-6-3