The Japan Society of Applied Physics

[P3-4] Control of UV Radiation Damages for the High Sensitive CCD Image Sensor

Yasushi Ishikawa、Yuji Katoh、Mitsuru Okigawa、Seiji Samukawa (1.Intelligent Nano-Process laboratory, Institute of Fluid Science, Tohoku University、2.Sanyo Electric Co., Ltd., Component Group, Semiconductor Company, CCD Business Unit, Development Department)

https://doi.org/10.7567/SSDM.2004.P3-4