[P3-8] Improving Characteristics of Tantalum Oxide Thin Film Devices with Copper Electrodes

Kou-Chiang Tsai、Wen-Fa Wu、Cheng-Ping Kuan、Chi-Chang Wu、Chuen-Guang Chao (1.Department of Materials Science and Engineering, National Chiao-Tung University、2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2004.P3-8