The Japan Society of Applied Physics

[A-7-1] Atomic Layer Deposition of PMOS Metal Gate Electrodes and High-k/Metal Interface Reactions for Advanced Device Applications

G.N. Parsons、K.J. Park、D.B. Terry (1.Department of Chemical and Biomolecular Engineering North Carolina State University)

https://doi.org/10.7567/SSDM.2005.A-7-1