[P1-20] Effect of Hydrogen on Helium implant-induced Nanocavities

A. Vengurlekar、S. Ashok、E. Ntsoenzok、N. D. Theodore (1.Department of Engineering Science, The Pennsylvania State University、2.CERI/CNRS、3.Advanced Products R&D Lab, Freescale Semiconductor)

https://doi.org/10.7567/SSDM.2005.P1-20