[P2-3] Infrared Complex Dielectric Function Analysis for Chemical Bonding Structure of Porous Silica Low Dielectric Constant Films

Syozo Takada, Nobuhiro Hata, Shingo Hishiya, Nobutoshi Fujii, Takahiro Nakayama, Takamaro Kikkawa (1.ASRC, AIST, 2.MIRAI, ASRC-AIST, 3.MIRAI, ASET, 4.RCNS, Hiroshima University)

https://doi.org/10.7567/SSDM.2005.P2-3