[P8-10L] Growth and Characterization of Germanium on Insulator (GOI) from Sputtered Ge by Novel Single and Dual Necking techniques

S. Balakumar、M. M. Roy、 Ramamurthy、Gao Fei、 Chih-Hang、R. kumar、N. Balasubramanian、S. Tripathy、S.J. Lee、D.L. Kwong (1.Institute of Microelectronics、2.Department of Electrical and Computer Engineering National University of Singapore、3.Institute of Materials Research Engineering)

https://doi.org/10.7567/SSDM.2005.P8-10L