[P8-10L] Growth and Characterization of Germanium on Insulator (GOI) from Sputtered Ge by Novel Single and Dual Necking techniques

S. Balakumar, M. M. Roy, Ramamurthy, Gao Fei, Chih-Hang, R. kumar, N. Balasubramanian, S. Tripathy, S.J. Lee, D.L. Kwong (1.Institute of Microelectronics, 2.Department of Electrical and Computer Engineering National University of Singapore, 3.Institute of Materials Research Engineering)

https://doi.org/10.7567/SSDM.2005.P8-10L