Self-Aligned Fabrication Process of Organic Thin-Film-Transistors on the Flexible Substrate Using Photo-Sensitive Self-Assembled Monolayers

T. Arai; N. Sato; K. Yamaguchi; M. Kawasaki; M. Fujimori; T. Shiba; M. Ando; K. Torii

doi:https://doi.org/10.7567/SSDM.2006.D-10-3

[D-10-3] Self-Aligned Fabrication Process of Organic Thin-Film-Transistors on the Flexible Substrate Using Photo-Sensitive Self-Assembled Monolayers

T. Arai、N. Sato、K. Yamaguchi、M. Kawasaki、M. Fujimori、T. Shiba、M. Ando、K. Torii (1.Hitachi, Ltd., Central Research Laboratory、2.Department of Chemistry, Faculty of Science, Kanagawa University、3.Hitachi, Ltd., Advanced Research Laboratory)

https://doi.org/10.7567/SSDM.2006.D-10-3

2006 International Conference on Solid State Devices and Materials

[D-10-3] Self-Aligned Fabrication Process of Organic Thin-Film-Transistors on the Flexible Substrate Using Photo-Sensitive Self-Assembled Monolayers