[F-1-5] Impact of (111)-Oriented SrRuO3/Pt Tailored Electrode for Highly Reproducible Preparation of MOCVD-PZT Film for High Density FeRAM

N. Menou、H. Kuwabara、H. Funakubo (1.Tokyo Institute of Technology, Department of Innovative and Engineered Materials)

https://doi.org/10.7567/SSDM.2006.F-1-5