The Japan Society of Applied Physics

[J-3-2] Real-Time Observation of Initial Thermal Oxidation on Si(110)-16×2 Surfaces by O1s Photoemission Spectroscopy Using Synchrotron Radiation

Maki Suemitsu, Atsushi Kato, Hideaki Togashi, Atsushi Konno, Yoshihisa Yamamoto, Yuden Teraoka, Akitaka Yoshigoe, Yuzuru Narita (1.Center for Interdisciplinary Research, Tohoku Univ., 2.Japan Atomic Energy Agency, 3.Kyushu Institute of Technology)

https://doi.org/10.7567/SSDM.2006.J-3-2