Discrete-Dopant-Fluctuated Threshold Voltage Roll-Off in Sub-16nm Bulk FinFETs

Yiming Li; Chih-Hong Hwang; Hsuan-Ming Huang; Ta-Ching Yeh

doi:https://doi.org/10.7567/SSDM.2007.B-8-4

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[B-8-4] Discrete-Dopant-Fluctuated Threshold Voltage Roll-Off in Sub-16nm Bulk FinFETs

Yiming Li、Chih-Hong Hwang、Hsuan-Ming Huang、Ta-Ching Yeh (1.Department of Communication Engineering, National Chiao Tung University、2.Corresponding author.)

https://doi.org/10.7567/SSDM.2007.B-8-4

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