[E-2-3] Imprint Property of Optical Mach-Zehnder Interferometer Using Sputter Deposited (Ba,Sr)TiO3 at Low Temperature
Masato Suzuki、Kazuma Nagata、Shin Yokoyama
(1.Research Center for Nanodevices and Systems, Hiroshima University)
https://doi.org/10.7567/SSDM.2007.E-2-3