The Japan Society of Applied Physics

[F-9-3] Origin of Structural Phase Transformation of SiO2-doped HfO2

Kazuyuki Tomida、Koji Kita、Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo、2.Research Fellow of the Japan Society for the Promotion of Science)

https://doi.org/10.7567/SSDM.2007.F-9-3