Optimum Rapid Thermal Activation for Mg-doped p-type GaN

Motoi Nagamori; Shuichi Ito; Hiroshi Saito; Kenji Shiojima; Shuhei Yamada; Naoki Shibata; Masaaki Kuzuhara

doi:https://doi.org/10.7567/SSDM.2007.P-6-3

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-6-3] Optimum Rapid Thermal Activation for Mg-doped p-type GaN

Motoi Nagamori、Shuichi Ito、Hiroshi Saito、Kenji Shiojima、Shuhei Yamada、Naoki Shibata、Masaaki Kuzuhara (1.Graduate School of Engineering, University of Fukui、2.Toyoda gosei Corporation)

https://doi.org/10.7567/SSDM.2007.P-6-3

▲