[D-7-3] Enhanced Sensitivity of SOI Photodiode by Au Nanoparticles

Y. Matsuo¹、A. Ono¹、H. Satoh¹、H. Inokawa¹ (1.Shizuoka Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.D-7-3