DMOTMDS/MTMOS Multi-Stacked SiOCH films for Super-Low-k and Sufficient Modulus Formed by Damage-free Neutral Beam Enhanced CVD

[H-5-2] DMOTMDS/MTMOS Multi-Stacked SiOCH films for Super-Low-k and Sufficient Modulus Formed by Damage-free Neutral Beam Enhanced CVD

T. Sasaki¹、S. Yasuhara¹、T. Shimayama²、K. Tajima²、H. Yano²、S. Kadomura²、M. Yoshimaru²、N. Matsunaga²、S. Samukawa¹ (1.Tohoku Univ.、2.STARC , Japan)