[I-8-5] In-situ observation of polycrystalline Si thin films grown using Al-doped ZnO on glass substrate by the aluminum-induced crystallization

M. Jung¹, A. Okada², T. Saito², T. Suemasu², N. Usami¹ (1.Tohoku Univ., 2.Univ. of Tsukuba , Japan)

https://doi.org/10.7567/SSDM.2010.I-8-5