[P-10-4] Effects of pore on dielectric constants of films deposited by PECVD

S. Park¹、K. Kim¹、C. Gong¹、N. Lee¹、Y. Kwon¹、D. Lee¹、M. Kim² (1.R&D Center ATTO.Co,.Ltd、2.Air Products and chemicals Korea Manufac. , Korea)

https://doi.org/10.7567/SSDM.2010.P-10-4