[F-5-3] Robust Data Retention and Superior Endurance SONOS Nonvolatile Memory with NH₃ Plasma Treated and Pd NCs Embedded Charge Storage Layer

S. H. Liu¹、W. L. Yang¹、S. T. Chen¹、M. R. Ye¹、T. S. Chao² (1.Feng Chia Univ.、2.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.F-5-3