[GH-2-4] A Monolithically-Integrated, Batch Post-Processed 17.8 V Silicon Solar Cell for Remote MEMS Driving I. Mori1, S. Morishita1, M. Kubota1, K. Watanabe1, Y. Mita1 (1.Univ. of Tokyo , Japan) https://doi.org/10.7567/SSDM.2011.GH-2-4