[L-9-5] Preparation of a Diameter-controlled Silicon Nanowire Array by Metal Assisted Chemical Etching using Silica Nanoparticles (MACES)

S. Kato¹, Y. Watanabe¹, Y. Kurokawa¹, A. Yamada¹, Y. Ohta², Y. Niwa², M. Hirota² (1.Tokyo Tech, 2.Nissan Res. Center , Japan)

https://doi.org/10.7567/SSDM.2011.L-9-5