[P-11-11] Plasma Induced Damage Affecting Mechanical Properties of Silicon Microcantilevers and Effects of Thermal Annealing on Their Recovery

A. Wada¹、Y. Yanagisawa¹、M. Tomura¹、C. H. Huang¹、S. Yamasaki²、T. Ono¹、S. Samukawa¹ (1.Tohoku Univ.、2.AIST , Japan)

https://doi.org/10.7567/SSDM.2011.P-11-11