[P-3-13] Stack Gate Technique for Feasible Bulk FinFETs

Y. B. Liao¹, M. H. Chiang², W. C. Hsu¹, Y. S. Lai³, H. Li² (1.National Cheng Kung Univ., 2.National Ilan Univ., 3.National Nano Device Lab. , Taiwan)

https://doi.org/10.7567/SSDM.2011.P-3-13