Field Emission Properties of 10-nm Pillars of Organics Fabricated by Pt particles and Plasma Etching

T. Suzuki; K. Takeda; H. Kondo; K. Ishikawa; Y. Setsuhara; M. Shiratani; M. Sekine; M. Hori

doi:https://doi.org/10.7567/SSDM.2011.P-8-3

2011 International Conference on Solid State Devices and Materials

2011年9月27日〜 2011年9月30日
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

[P-8-3] Field Emission Properties of 10-nm Pillars of Organics Fabricated by Pt particles and Plasma Etching

T. Suzuki¹、K. Takeda^1,4、H. Kondo¹、K. Ishikawa¹、Y. Setsuhara^2,4、M. Shiratani^3,4、M. Sekine^1,4、M. Hori^1,4 (1.Nagoya Univ.、2.Osaka Univ.、3.Kyushu Univ.、4.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.P-8-3

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