[A-1-1] Silicon/Ge/Silica monolithic photonic integration for telecommunications applications.
K. Yamada1、T. Tsuchizawa1、H. Nishi1、R. Kou1、T. Hiraki1、H. Fukuda1、Y. Ishikawa2、K. Wada2
(1.NTT Corporation、2.Univ of Tokyo , Japan)
https://doi.org/10.7567/SSDM.2012.A-1-1