[A-2-6] Fabrication of Er silicate crystalline waveguide by directed self-assembly approach using radical assisted sputtering
T. Nakajima1, T. Shinagawa1, T. Kimura1, H. Isshiki1, T. Sugawara2, Y. Jiang2
(1.Univ. of Electro-Communications, 2.Shincron Co. Ltd. , Japan)
https://doi.org/10.7567/SSDM.2012.A-2-6
