[A-2-6] Fabrication of Er silicate crystalline waveguide by directed self-assembly approach using radical assisted sputtering

T. Nakajima¹、T. Shinagawa¹、T. Kimura¹、H. Isshiki¹、T. Sugawara²、Y. Jiang² (1.Univ. of Electro-Communications、2.Shincron Co. Ltd. , Japan)

https://doi.org/10.7567/SSDM.2012.A-2-6