Characterization of carbon nanotubes based vertical interconnects.

B. Vereecke; M. H. Van der Veen; Y. Barbarin; M. Sugiura; Y. Kashiwagi; D. J. Cott; C. Huyghebaert; Z. Tokei

doi:https://doi.org/10.7567/SSDM.2012.C-1-2

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[C-1-2] Characterization of carbon nanotubes based vertical interconnects.

B. Vereecke¹、M. H. Van der Veen¹、Y. Barbarin¹、M. Sugiura²、Y. Kashiwagi²、D. J. Cott¹、C. Huyghebaert¹、Z. Tokei¹ (1.IMEC , Belgium、2.Tokyo Electron Ltd , Japan)

https://doi.org/10.7567/SSDM.2012.C-1-2

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