[PS-2-9] Layered Low-k Porous Silica Zeolite Films for Inter-Metal Dielectric with High Elastic Modulus

T. Yamamoto¹, T. Sato¹, Y. Seino², K. Hattori², S. Kuroki¹, T. Kikkawa¹ (1.Hiroshima Univ, 2.AIST , Japan)

https://doi.org/10.7567/SSDM.2012.PS-2-9