Direct growth of epitaxial In-rich InxAl1-xN ternary alloys on Si(111) substrate by RF-MOMBE

W. C. Chen; Y. H. Wu; Jr. S. Tian; T. C. Yen; P. Y. Lin; Jr. Y. Chen; L. Chang

doi:https://doi.org/10.7567/SSDM.2012.PS-8-2

[PS-8-2] Direct growth of epitaxial In-rich InxAl1-xN ternary alloys on Si(111) substrate by RF-MOMBE

W. C. Chen¹, Y. H. Wu², Jr. S. Tian³, T. C. Yen⁴, P. Y. Lin⁵, Jr. Y. Chen⁶, L. Chang⁷ (1.National Chiao Tung Univ., 2.National Chiao Tung Univ., 3.National Chiao Tung Univ., 4.National Chiao Tung Univ., 5.National Chiao Tung Univ., 6.National Chiao Tung Univ., 7.National Chiao Tung Univ. , Taiwan, R.O.C.)

https://doi.org/10.7567/SSDM.2012.PS-8-2

2012 International Conference on Solid State Devices and Materials

[PS-8-2] Direct growth of epitaxial In-rich InxAl1-xN ternary alloys on Si(111) substrate by RF-MOMBE