[P-3-1] Ultrasonic-Assisted Mist Deposition for Green Materials and Devices
S. Fujita1、K. Kaneko2、S. Katori3、T. Kawaharamura4、M. Furuta4
(1.Kyoto Univ.、2.Kyoto Univ.、3.Tsuyama National College of Tech.、4.Kochi Univ. Tech. (Japan))
https://doi.org/10.7567/SSDM.2013.P-3-1