[PS-11-5] Low Temperature Ta2O5/X-doped Al2O3/SiO2/Si for pH Sensing Membrane by Spray Pyrolysis Doped System

Y.T. Lin¹、C.M. Yang²、T.J. Wang³、W.C. Sun³、M.Y. Shih¹、C.A. Kao¹、C.S. Lai¹ (1.Univ. of Chang Gung、2.Univ. of Chang Gung、3.Indus. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-11-5