[PS-11-5] Low Temperature Ta2O5/X-doped Al2O3/SiO2/Si for pH Sensing Membrane by Spray Pyrolysis Doped System
Y.T. Lin1, C.M. Yang2, T.J. Wang3, W.C. Sun3, M.Y. Shih1, C.A. Kao1, C.S. Lai1
(1.Univ. of Chang Gung, 2.Univ. of Chang Gung, 3.Indus. (Taiwan))
https://doi.org/10.7567/SSDM.2013.PS-11-5
