[PS-2-3] Room Temperature Bonding of Heterogeneous Materials for Near-Infrared Image Sensor

T. Shuto¹, K. Iwanabe¹, M. Ogura², K. Nishida², T. Asano¹ (1.Kyushu Univ., 2.IRspec Corp. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-2-3