[PS-7-20] Ta2O5 optical waveguide on silica substrate fabricated by CF4 reactive ion etching

G. Li¹, Y. Zhao¹, T. Maruyama¹, K. Iiyama¹ (1.Univ. of Kanazawa (Japan))

https://doi.org/10.7567/SSDM.2013.PS-7-20