[PS-8-8] Crystallinity Control of Sputtered ZnO:Al Transparent Conducting Films by Utilizing Buffer Layers Fabricated via Nitrogen Mediated Crystallization

N. Itagaki^1,2、K. Oshikawa¹、I. Suhariadi¹、K. Matsushima¹、D. Yamashita¹、H.W. Seo¹、K. Kamataki¹、G. Uchida¹、K. Koga¹、M. Shiratani¹ (1.Kyushu Univ.、2.JST-PRESTO (Japan))

https://doi.org/10.7567/SSDM.2013.PS-8-8