[B-2-2] High Efficiency Apodized Grating Couplers with Metal Mirrors between a-Si:H Multilayer Waveguides toward 3D Optical Interconnection

Y. Kuno¹、J. Kang¹、Y. Hayashi¹、J. Suzuki¹、T. Amemiya¹、N. Nishiyama¹、S. Arai¹ (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2014.B-2-2