Humidity Tolerance for Athermal Si-Slot Wavelength Filters using Amorphous Fluoride Polymer and SiO<sub>2</sub> Protection Layer

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

Y. Atsumi¹、J. Kang¹、J. Suzuki¹、Y. Hayashi¹、N. Nishiyama¹、S. Arai¹ (1.Tokyo Tech (Japan))