Record-Low Contact Resistance for InAlN/AlN/GaN HEMTs on Si with Non-Gold Metal

S. Arulkumaran; G.I.. Ng; K. Ranjan; C.M. Manoj Kumar; S.C. Foo; K.S. Ang; S. Vicknesh

doi:https://doi.org/10.7567/SSDM.2014.E-1-6L

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-1-6L] Record-Low Contact Resistance for InAlN/AlN/GaN HEMTs on Si with Non-Gold Metal

S. Arulkumaran¹、G.I.. Ng^1,2、K. Ranjan¹、C.M. Manoj Kumar¹、S.C. Foo¹、K.S. Ang¹、S. Vicknesh¹ (1.Temasek Laboratories@NTU, Nanyang Technological Univ.、2.School of EEE, Nanyang Technological Univ. (Singapore))

https://doi.org/10.7567/SSDM.2014.E-1-6L

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