Impact of Oriented Crystalline InGaZnO Semiconductor on Electrical Properties of Thin Film Transistor

S.S. Yen; H.H. Hsu; P. Chiou; C.H. Cheng; C.Y. Chang; Y.C. Lai; C.P. Chang; H.H. Lu; C.S. Chuang; Y.H. Lin

doi:https://doi.org/10.7567/SSDM.2014.E-7-5

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-7-5] Impact of Oriented Crystalline InGaZnO Semiconductor on Electrical Properties of Thin Film Transistor

S.S. Yen¹、H.H. Hsu¹、P. Chiou¹、C.H. Cheng²、C.Y. Chang¹、Y.C. Lai³、C.P. Chang³、H.H. Lu³、C.S. Chuang³、Y.H. Lin³ (1.NCTU、2.National Taiwan Normal Univ.、3.AU Optronics Corp. (Taiwan))

https://doi.org/10.7567/SSDM.2014.E-7-5

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