[PS-3-5] Initial and Long-Term Frequency Degradation on Ring Oscillators from Plasma Induced Damage in 65 nm Bulk and Silicon On Thin BOX processes

R. Kishida¹, A. Oshima¹, M. Yabuuchi¹, K. Kobayashi¹ (1.Kyoto Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-3-5