Doped Carbon Nanotubes for Interconnects

J. Robertson

doi:https://doi.org/10.7567/SSDM.2015.E-1-6

15:30 〜 15:45

[E-1-6] Doped Carbon Nanotubes for Interconnects

^○J. Robertson¹, S. Esconjauregui¹, L. D'Arsie¹, J. Yang¹, H. Sugime¹, G. Zhong¹, S. Vollebregt², R. Ishihara², C. Cepek³, G. Duesberg⁴, T. Hallam⁴, Y. Guo¹ (1.Univ. of Cambridge, 2.Delft Univ., 3.TASC, 4.Trinity College Dublin(UK))

https://doi.org/10.7567/SSDM.2015.E-1-6

2015 International Conference on Solid State Devices and Materials

[E-1-6] Doped Carbon Nanotubes for Interconnects