The Japan Society of Applied Physics

16:40 〜 16:55

[E-4-4L] Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology

D. Yamane1,4, T. Konishi2, M. Takayasu1,4, T. Safu2, H. Toshiyoshi3,4, M. Sone1,4, K. Masu1,4, K. Machida1,2,4 (1.Tokyo Tech, 2.NTT Adv. Tech. Corp., 3.Univ. of Tokyo, 4.JST-CREST(Japan))

https://doi.org/10.7567/SSDM.2015.E-4-4L