09:45 〜 10:00

[G-3-4] Selective Epitaxy of Ge on Nano-tip Patterned Si (001): Towards Defect-free Ge Islands

^○G. Niu¹, G. Capellini^1,2, T. Niermann³, M. Salvalaglio⁴, A. Marzegalli⁴, M. A. Schubert¹, P. Zaumseil¹, H. M. Krause¹, O. Skibitzki¹, M. Lehmann³, F. Montalenti⁴, Y. H. Xie⁵, SchroederT. ^1,6 (1.IHP, 2.Univ. Roma Tre, 3.Tech. Univ. Berlin, 4.Univ. degli Studi di Milano-Bicocca, 5.UCLA, 6.BTU Cottbus-Senftenberg(Germany))

https://doi.org/10.7567/SSDM.2015.G-3-4