16:30 〜 16:45

[B-2-03] Double heterojunction Si-Ge-Si pin waveguide photodiodes for high-speed communications at 1550nm wavelength

^○L. Virot¹, D. Benedikovic², G. Aubin², J.-M. Hartmann¹, B. Szelag¹, F. Amar², X. Le Roux², C. Alonso-Ramos², P. Crozat², D. Marris-Morini², E. Cassan², C. Baudot³, F. Boeuf³, J.M. Fédéli¹, C. Kopp¹, L. Vivien² (1.Univ. Grenoble Alpes and CEA, LETI (France), 2.Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Univ. Paris-Saclay (France), 3.STMicroelectronics, Silicon Technology Development (France))

https://doi.org/10.7567/SSDM.2019.B-2-03