15:30 〜 15:45

[J-1-05 (Late News)] Copper-Ruthenium System Study for Advanced Hybrid BEOL-Interconnects Applications

^○N. Jourdan¹, M. Korytov¹, S. Van Elshocht¹, Z. TÖkei¹ (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2019.J-1-05