14:45 〜 15:00

[C-1-03] Development of Manganese Nitride Wiring with High Thermal Stability Caused by Saturation of the Mean Free Path

〇Hisashi Kino¹, Aoba Onishi¹, Takafumi Fukushima¹, Tetsu Tanaka¹ (1. Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2020.C-1-03